Products: Sputtering

  • 24" x 24" x 18" chamber

  • (3) 6" diameter sputtering sources (2) 1500 watt DC (1) 1250 watt RF with matching network

  • Rotary substrate holder, water cooled

  • CT-8 crypump with automatic throttle valve

  • PLC controlled automatic pumpdown

  • MKS capacitance manometer

  • 8cm gridded ion source

  • (3) mass flow controllers

  • Sycon STM 100 deposition monitor

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