 |
- 24" x 24" x 18" chamber
- (3) 6" diameter sputtering sources (2) 1500 watt DC (1)
1250 watt RF with matching network
- Rotary substrate holder, water cooled
- CT-8 crypump with automatic throttle valve
- PLC controlled automatic pumpdown
- MKS capacitance manometer
- 8cm gridded ion source
- (3) mass flow controllers
- Sycon STM 100 deposition monitor
|
